The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2026
Filed:
Aug. 22, 2022
Disco Corporation, Tokyo, JP;
Yuta Mizumoto, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
An inspecting apparatus for inspecting an ingot having a polished surface includes a holding table configured to hold the ingot with the polished surface of the ingot exposed, a light source configured to irradiate the polished surface of the ingot held by the holding table with light at a predetermined incidence angle, an imaging unit configured to condense and photograph reflected light reflected by the polished surface of the ingot, and form a photographed image emphasizing unevenness produced on the polished surface by a crack extending in the ingot, and a control unit including a determining section configured to determine the state of the ingot by comparing the formed photographed image with a preset condition.