The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2026
Filed:
Mar. 29, 2024
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventor:
Nilabh K. Roy, Cedar Park, TX (US);
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/30 (2006.01); G01B 11/16 (2006.01); H10P 72/50 (2026.01);
U.S. Cl.
CPC ...
H10P 72/53 (2026.01); G01B 11/16 (2013.01); G01B 11/30 (2013.01);
Abstract
Some devices, systems, and methods for aligning a chiplet to a substrate obtain an image of a region on a chiplet, measure a deviation from planarity of the region on the chiplet, estimate a chiplet-position error of the chiplet based at least on the image of the region and the deviation from planarity of the region, and adjust a relative position of the chiplet and a substrate based on the chiplet-position error.