The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2026
Filed:
Feb. 23, 2023
Beijing Naura Microelectronics Equipment Co., Ltd., Beijing, CN;
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD., Beijing, CN;
Abstract
The present disclosure provides a furnace tube assembly and disassembly auxiliary device configured to support a furnace tube when the furnace tube of horizontal semiconductor equipment is mounted to a furnace body or is removed from the furnace body. The furnace tube assembly and disassembly auxiliary device includes a base configured to detachably be connected to a loading and unloading mechanism of the horizontal semiconductor equipment to cause the loading and unloading mechanism to drive the base to ascend and descend vertically, and a supporting body arranged on the base and moving along a first horizontal direction relative to the base. The supporting body includes a rolling support structure. The rolling support structure is configured to support the furnace tube, and the rolling support structure is roll-cooperated with the furnace tube to cause the furnace tube to move along a second horizontal direction.