The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2026
Filed:
Sep. 27, 2020
Applicant:
Kla Corporation, Milpitas, CA (US);
Inventors:
Assignee:
KLA CORPORATION, Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06N 3/08 (2023.01); G06N 3/04 (2023.01);
U.S. Cl.
CPC ...
G06N 3/08 (2013.01); G06N 3/04 (2013.01);
Abstract
An explanation of a detection/classification algorithm made using a deep learning neural network clarifies the results that are formed and helps a user to identify the root cause of defect detection/classification model performance issues. A relevance map is determined based on a layer-wise relevance propagation algorithm. A mean intersection over union score between the relevance map and a ground truth is determined. A part of one of the semiconductor images that contributed to the classification using the deep learning model based on the relevance map and the mean intersection over union score is determined.