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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12694194 B1

PDFFull Text
Date of Patent:
Jul. 28, 2026

Filed:

Oct. 11, 2022

Method for fabricating photomask layout and method for fabricating of semiconductor device using the same

Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Sung-Yong Moon, Seoul, KR;

Won-Chan Lee, Hwaseong-si, KR;

Assignee:

Samsung Electronics Co., Ltd., Suwon-Si, KR;

Attorney:

Fish & Richardson P.C.

Primary Examiner:

Leigh M Garbowski

Int. Cl.
CPC ...
G06F 30/398 (2020.01); G03F 1/36 (2012.01); G03F 1/70 (2012.01); G03F 7/00 (2006.01); G06F 30/30 (2020.01); G06F 119/18 (2020.01);
U.S. Cl.
CPC ...
G06F 30/398 (2020.01); G03F 1/36 (2013.01); G03F 1/70 (2013.01); G03F 7/70441 (2013.01); G06F 2119/18 (2020.01);
Abstract

A method for fabricating a photomask layout is provided. The method includes: receiving a first layout including a main pattern; generating a second layout by generating an assist feature in consideration of optical properties of the main pattern in the first layout; generating a third layout by performing optical proximity correction (OPC) on a second layout; and outputting the third layout to a corrected layout when the assist feature is not generated on an ACI image of a semiconductor film etched by using a photomask generated using the third layout, as an etching mask.

Find Patent Forward Citations

Moon, Sung-Yong. (2026). Method for fabricating photomask layout and method for fabricating of semiconductor device using the same (U.S. Patent No. 12694194). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12694194

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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