Measurement apparatus and measurement method

Abstract

There is realized a measurement apparatus capable of highly accurate synchronous detection while keeping costs low. A measurement apparatus is characterized by including: a current generation circuit causing an alternating constant current corresponding to a reference signal (Ss) with a predetermined frequency to occur and supplying the alternating constant current to a measurement target object; a voltage detection circuit detecting a voltage v that has occurred in the measurement target object; a signal generation circuit detecting a current i flowing in the measurement target object and generating a binary signal (Sip) synchronized with the current i; a first synchronous detection unit performing synchronous detection of the voltage v based on the reference signal (Ss) and calculating an amplitude |V| of the voltage v and a voltage phase difference φv; a second synchronous detection unit performing synchronous detection of the binary signal (Sip) based on the reference signal (Ss) and calculating a current phase difference φi; and an arithmetic unit calculating electrical characteristics of the measurement target object based on the amplitude |V| of the voltage and the voltage phase difference φv, the current phase difference φi, and an amplitude |I| of the current.