The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2026
Filed:
Dec. 18, 2020
Park Systems Corp., Suwon-si, KR;
Ahjin Jo, Seoul, KR;
Sang-Il Park, Seongnam-si, KR;
Byoung-Woon Ahn, Anyang-si, KR;
Seung Hun Baik, Seoul, KR;
PARK SYSTEMS CORP., Suwon-si, KR;
Abstract
A method for acquiring a surface characteristic of a measuring object using a tilted tip, and an atomic force microscope for carrying out the method, are provided. The method includes acquiring a surface characteristic of the measuring object while relatively moving the tip in a first direction with respect to the surface of the measuring object using a first control method, controlling the tip to deviate from an abnormal state by a second control method set based on a predefined shape of the surface of the measuring object when at least one characteristic value obtained by the tip is out of a specific range during the acquiring, and performing the acquiring of the surface characteristic again after the controlling of the tip. The method automatically separates a tip entering the inner space of an undercut structure so that an image deep inside the undercut structure may be acquired.