The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2026
Filed:
Mar. 08, 2024
Kioxia Corporation, Tokyo, JP;
Yuki Abe, Kuwana, JP;
Akira Hamaguchi, Yokkaichi, JP;
Takaki Hashimoto, Yokohama, JP;
Kazuhiro Nojima, Mie, JP;
Kaori Fumita, Yokkaichi, JP;
Kioxia Corporation, Tokyo, JP;
Abstract
A measurement device includes an X-ray irradiation section; an X-ray detection section configured to detect scattered X-rays generated from an object; and an analysis section configured to analyze diffraction images obtained through photoelectric conversion of the scattered X-rays and estimate a three-dimensional shape of the object. A recessed portion is formed in a first film from an opening portion in a second film formed on the first film. The analysis section estimates a three-dimensional shape of the object on the basis of the diffraction images acquired while an irradiation angle of the X-rays with respect to the object is changed and shape data obtained by measuring the object in advance. The shape data includes a film thickness of the second film, a neck diameter, and a bottom diameter.