The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2026
Filed:
Sep. 15, 2022
Applicant:
Kokusai Electric Corporation, Tokyo, JP;
Inventors:
Kaichiro Minami, Toyama, JP;
Naonori Akae, Toyama, JP;
Akito Hirano, Toyama, JP;
Sadayasu Suyama, Toyama, JP;
Takayuki Yamamoto, Toyama, JP;
Shunsuke Asakura, Toyama, JP;
Yugo Orihashi, Toyama, JP;
Yasuhiro Megawa, Toyama, JP;
Assignee:
Kokusai Electric Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 25/18 (2006.01); C30B 25/16 (2006.01); H10P 14/20 (2026.01);
U.S. Cl.
CPC ...
C30B 25/186 (2013.01); C30B 25/16 (2013.01); H10P 14/3602 (2026.01); H10P 14/20 (2026.01); H10P 14/3411 (2026.01);
Abstract
There is provided a technique that includes: (a) forming a modified layer by modifying at least a portion of an oxide film of a substrate by performing, a predetermined number of times: (a1) supplying a fluorine-containing gas to the substrate including the oxide film; and (a2) supplying a first reducing gas to the substrate; and (b) supplying the fluorine-containing gas to the substrate after the modified layer is formed.