The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2026
Filed:
Dec. 07, 2021
Tokyo Seimitsu Co., Ltd., Hachioji, JP;
Hajime Akahori, Hachioji, JP;
TOKYO SEIMITSU CO. , LTD., Tokyo, JP;
Abstract
A processing system capable of processing a workpiece with high accuracy. A tilting device capable of tilting a rotation axisof a chuckholds a workpiece W. A film thickness measurement devicemeasures a film thickness of the workpiece W after fine grinding in a non-contact manner. A control deviceoperates a shape of the workpiece W after fine grinding on the basis of a measurement value of the film thickness measurement device, calculates a tilt angle of the tilting device such that a difference between a maximum thickness and a minimum thickness of the workpiece W after the fine grinding decreases, and tilts the chuckby the tilt angle such that the workpiece W after the fine grinding is reprocessed by rough grinding, intermediate grinding, and fine grinding in this order with the chucktilted by the tilt angle.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile