The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2026
Filed:
Feb. 21, 2024
Ngk Insulators, Ltd., Nagoya-City, JP;
Seiya Inoue, Handa-City, JP;
Tatsuya Kuno, Nagoya-City, JP;
Masaki Ishikawa, Handa-City, JP;
Taro Usami, Kakamigahara-City, JP;
Ren Nakamura, Nagoya-City, JP;
Natsuki Hirata, Nagoya-City, JP;
Kenji Yonemoto, Tokoname-City, JP;
NGK INSULATORS, LTD., Nagoya-City, JP;
Abstract
A wafer placement table includes a ceramic plate having a wafer placement surface on its top surface and incorporating an electrode; an electrically conductive plate joined to a bottom surface of the ceramic plate; a ceramic plate penetrating part extending through the ceramic plate; an electrically insulating gas passage plug provided in the ceramic plate penetrating part and that allows gas to pass inside; a gas introduction passage provided at least inside the electrically conductive plate and communicating with the ceramic plate penetrating part; and an electrically conductive gas passage part provided in the gas introduction passage, being in contact with a bottom surface of the electrically insulating gas passage plug, being electrically continuous with the electrically conductive plate, and that allows gas to pass inside.