The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 21, 2026

Filed:

Apr. 07, 2023
Applicants:

Fuji Electric Co., Ltd., Kawasaki, JP;

National Institute of Advanced Industrial Science and Technology, Tokyo, JP;

Inventors:

Naoki Kumagai, Nagano, JP;

Masakazu Okada, Tsukuba, JP;

Shinsuke Harada, Tsukuba, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10D 30/66 (2025.01); H10D 62/10 (2025.01); H10D 62/832 (2025.01);
U.S. Cl.
CPC ...
H10D 30/665 (2025.01); H10D 62/112 (2025.01); H10D 62/127 (2025.01); H10D 62/8325 (2025.01);
Abstract

A superjunction semiconductor device having a termination structure portion surrounding an active region in a plan view. The device includes: a semiconductor substrate; a first semiconductor layer provided on the semiconductor substrate; and a parallel pn structure and a channel stopper provided in the first semiconductor layer. The channel stopper surrounds the parallel pn structure in the plan view, and contacts the parallel pn structure in the termination structure portion. The parallel pn structure includes a plurality of first columns each having a first width and a plurality of second columns each having a second width that repeatedly alternate one another parallel to the main surface. In a region of the parallel pn structure contacting the channel stopper, a product of the second width and an impurity concentration of the second columns is less than a product of the first width and an impurity concentration of the first columns.


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