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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12689009 B1

PDFFull Text
Date of Patent:
Jul. 21, 2026

Filed:

Jul. 21, 2023

Substrate transfer system and transfer module

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Toshiaki Toyomaki, Miyagi, JP;

Norihiko Amikura, Miyagi, JP;

Seiichi Kaise, Miyagi, JP;

Masatomo Kita, Miyagi, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorney:

XSENSUS LLP

Primary Examiner:

Saul Rodriguez

Assistant Examiner:

Brendan P Tighe

Int. Cl.
CPC ...
H01J 37/32 (2006.01); B65G 47/90 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32733 (2013.01); B65G 47/90 (2013.01); H01J 37/32091 (2013.01);
Abstract

This substrate transfer system is provided with: a load-lock module; an atmospheric transfer module having a first sidewall, a second sidewall and a third sidewall, the first sidewall extending along a first direction and connected to the load-lock module, the second sidewall extending along a second direction perpendicular to the first direction, the third sidewall being disposed on an opposite side of the second sidewall; a first load port extending outward from the second sidewall along the first direction; and a second load port extending outward from the third sidewall along the first direction.

Find Patent Forward Citations

Toyomaki, Toshiaki. (2026). Substrate transfer system and transfer module (U.S. Patent No. 12689009). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12689009

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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