The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2026
Filed:
Sep. 09, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Zheng John Ye, Santa Clara, CA (US);
Jeevan Prakash Sequeira, Milpitas, CA (US);
Chien-Teh Kao, Sunnyvale, CA (US);
Tae Kyung Won, San Jose, CA (US);
Young Dong Lee, Hwaseong-Si, KR;
Soo Young Choi, Fremont, CA (US);
Suhail Anwar, Saratoga, CA (US);
Jianhua Zhou, Campbell, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The present disclosure is directed to an antenna array. The antenna array includes a plurality of dielectric windows coupled to a support structure comprising a plurality of gas ports, a primary frame comprising a primary conduit connected to a power source and a plurality of secondary frames supported by the primary frame. The secondary frame includes a secondary conduit connected to the primary conduit. A plurality of inductive couplers are disposed over the plurality of dielectric windows and supported by the secondary frames. The plurality of inductive couplers include a plurality of antenna connectors and a plurality of plurality of antennas. The plurality of antenna connectors connect the plurality of antennas to the secondary conduit.