The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2026
Filed:
Sep. 05, 2023
Robert Bosch Gmbh, Stuttgart, DE;
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Ralf Noltemeyer, Herrenberg, DE;
Robert Bosch GmbH, Stuttgart, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
The invention relates to a method for operating an optical component having a mirror element, a substrate for carrying the mirror element, an actuator device for tilting the mirror element about one or two tilt axes, which actuator device has a first actuator electrode structure and a second actuator electrode structure, and a sensor device for detecting a tilt angle of the mirror element. The first actuator electrode structure in this case comprises a plurality of first active actuator electrodes and at least one first passive actuator electrode. The second actuator electrode structure in this case comprises a plurality of second active actuator electrodes and at least one second passive actuator electrode. At least one of the first active actuator electrodes is subjected to a first voltage and at least one of the second active actuator electrodes is subjected to a second voltage. In order to tilt the mirror element, the first and the second voltage are changed with different rates of change.