The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2026
Filed:
Apr. 04, 2024
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Arvinder Manmohansingh Chadha, San Jose, CA (US);
Gagandeep Singh Joshi, Fresno, CA (US);
Joseph Frederick Sommers, Roseville, CA (US);
Joseph Frederick Behnke, San Jose, CA (US);
Christopher Laurent Beaudry, San Jose, CA (US);
Wei-Sheng Lei, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); B23K 26/00 (2014.01); B23K 26/352 (2014.01); H10P 72/72 (2026.01); H10P 72/76 (2026.01); B23K 103/00 (2006.01);
U.S. Cl.
CPC ...
H10P 72/722 (2026.01); B23K 26/0006 (2013.01); B23K 26/355 (2018.08); H10P 72/7616 (2026.01); B23K 2103/52 (2018.08);
Abstract
A method includes receiving a ceramic plate of a substrate support system. The method further includes determining a feature pattern for a surface of the ceramic plate. The method further includes performing laser material processing of the surface of the ceramic plate to form the feature pattern comprising a plurality of features on the surface of the ceramic plate.