The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2026
Filed:
Jan. 26, 2023
Applicant:
Carl Zeiss Multisem Gmbh, Oberkochen, DE;
Inventor:
Stefan Schubert, Oberkochen, DE;
Assignee:
Carl Zeiss MultiSEM GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01); H01J 37/147 (2006.01); H01J 37/22 (2006.01); H01J 37/244 (2006.01); H01J 37/28 (2006.01); H01J 37/09 (2006.01); H01J 37/14 (2006.01); H01J 37/153 (2006.01); H01J 37/21 (2006.01);
U.S. Cl.
CPC ...
H01J 37/265 (2013.01); H01J 37/1472 (2013.01); H01J 37/22 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 37/09 (2013.01); H01J 37/14 (2013.01); H01J 37/153 (2013.01); H01J 37/21 (2013.01); H01J 2237/0453 (2013.01); H01J 2237/103 (2013.01); H01J 2237/1532 (2013.01); H01J 2237/2448 (2013.01);
Abstract
A multiple particle beam system with a mirror mode of operation, a method for operating a multiple particle beam system with a mirror mode of operation and an associated computer program product are disclosed. The multiple particle beam system can be operated in different mirror modes of operation which allow the multiple particle beam system to be inspected and recalibrated thoroughly. A detection system configured to operate in a first detection mode and/or in a second detection mode is used for the analysis.