The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2026
Filed:
Sep. 27, 2022
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Matthias Kestel, Dresden, DE;
Matthias Mueller, Lauchheim, DE;
Roland Gischa, Bibertal, DE;
Philipp Weishaupt, Ingolstadt, DE;
Thomas Stuebler, Haunsfeld, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A component of an optical system comprises an optical element and a first channel system outside the optical element and through which a cooling fluid can flow, such that, during operation of the optical system, heat generated by electromagnetic radiation incident on the optical element is absorbed and drawn off via the cooling fluid in the first channel system. The component also includes a second channel system through which a cooling fluid can flow to at least partially thermally shield a region of the component from the heat absorbed by the cooling fluid in the first channel system. The second channel system is outside the first channel system in the radial direction relative to the center of the optical element.