The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2026
Filed:
Jun. 29, 2021
Qorvo Us, Inc., Greensboro, NC (US);
Qorvo US, Inc., Greensboro, NC (US);
Abstract
Embodiments described herein involve a test structure for a sensor, comprising a substrate being part of the sensor and a moat structure disposed on the substrate. The sensor comprises a resonating structure comprising a piezoelectric layer having an active region. A passivation layer overlays the resonating structure including the active region. The moat structure is configured to at least partially surround the active region in plan view. An electrode is disposed on the substrate and comprises an electrode path. The electrode path crosses the moat structure at least one time in plan view. The moat structure at each moat crossing is configured to cause a change in electrical resistance of the electrode if there is passivation failure of the passivation layer at the moat crossing.