The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2026
Filed:
Nov. 05, 2021
Ebara Corporation, Tokyo, JP;
Masaki Tomita, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
One object of the present disclosure is to facilitate maintenance of components placed in a lower portion of a face down-type apparatus for plating. There is provided an apparatus for plating, comprising: a plating tank configured to store a plating solution therein; a substrate holder configured to hold a substrate in such a state that a plating surface of the substrate faces down; and a drawer unit mounted to the plating tank to be freely drawable in a horizontal direction and provided with an anode that is placed to be opposed to the substrate in the plating tank and with a variable anode mask that includes an opening which the anode is exposed from and that is configured to adjust an opening size of the opening.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile