The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 07, 2026

Filed:

May. 16, 2023
Applicant:

Hitachi High-tech Corporation, Tokyo, JP;

Inventors:

Yasuhiro Yoshida, Tokyo, JP;

Masayoshi Ishikawa, Tokyo, JP;

Toshinori Yamauchi, Tokyo, JP;

Kosuke Fukuda, Tokyo, JP;

Hiroyuki Shindo, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01); G06T 7/00 (2017.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01); G06T 7/001 (2013.01); H01J 37/28 (2013.01); G06T 2207/20081 (2013.01); H01J 2237/221 (2013.01); H01J 2237/2817 (2013.01);
Abstract

A defect inspection apparatus includes: a feature value calculation unit calculating a feature value based on a captured image of a sample; an image information reduction unit generating a latent variable by reducing an information quantity of the feature value; a statistic value estimation unit estimating an image statistic value that can be taken by a normal image based on the latent variable; and a defect detection unit detecting a defect in an inspection image based on the image statistic value and the inspection image of the sample.


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