The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2026
Filed:
Feb. 24, 2021
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventor:
Arnaud Hubaux, Erpent, BE;
Assignee:
ASML NETHERLANDS B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 13/04 (2006.01); G05B 13/02 (2006.01); H10P 74/20 (2026.01);
U.S. Cl.
CPC ...
G05B 13/048 (2013.01); G05B 13/0265 (2013.01); H10P 74/20 (2026.01);
Abstract
A method including: obtaining one or more models configured for predicting a process metric of a manufacturing process based on inputting process data; and using a reinforcement learning framework to evaluate the one or more models and/or model configurations of the one more models based on inputting new process data to the one or more models and determining a performance indication of the one or more models and/or model configurations in predicting the process metric based on inputting the new process data.