The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2026
Filed:
May. 13, 2024
Canon Kabushiki Kaisha, Tokyo, JP;
Norihiro Sakurakawa, Tochigi, JP;
Nobushige Korenaga, Tochigi, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
The present invention provides a structure forming a part of an exposure apparatus that includes a stage configured to move on a base while holding an original, and a projection optical system configured to project a pattern image of the original onto a substrate, the structure comprising: a plate arranged between a moving path of the stage and the projection optical system; and a plurality of support members arranged extending along a lower surface of the plate and configured to support the plate by contacting the lower surface.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile