The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2026
Filed:
Dec. 23, 2021
Hitachi High-tech Corporation, Tokyo, JP;
Yuta Urano, Tokyo, JP;
Toshifumi Honda, Tokyo, JP;
Takanori Kondo, Tokyo, JP;
Yuta Tagawa, Tokyo, JP;
HITACHI HIGH-TECH CORPORATION, Tokyo, JP;
Abstract
The system has a scanning device that rotates and drives the sample stage so as to change the relative positions of the sample and the illumination optical system; a plurality of detection optical systems that concentrate scattered illumination light from the surface of the sample; a plurality of sensors that convert the scattered illumination light concentrated by a corresponding detection optical system into electrical signals and output detection signals; and a signal processing device that processes the detection signals input from the plurality of sensors. With regard to any inspection location on the surface of the sample, the signal processing device extracts a comparison location in a correspondence relationship in which a θ coordinate has been set in an rθ circular coordinate system for the sample with the center of the sample serving as the origin point.