The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2026
Filed:
May. 25, 2023
Disco Corporation, Tokyo, JP;
Hayato Iga, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
The application of laser beams to at least two of a plurality of regions extending along a predetermined direction and the changing of at least two regions to which the laser beams are to be applied are alternately repeated to form peel-off layers in the ingot that include a plurality of modified portions positioned at a predetermined depth from the surface of the workpiece and cracks developed from the respective modified portions. The laser beams for forming the peel-off layers in the workpiece are thus simultaneously applied to the at least two of the regions. Therefore, it is possible to increase the throughput compared with a process in which the laser beams are applied successively to the regions.