The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2026
Filed:
Oct. 13, 2021
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Oreste Madia, Leuven, BE;
Giuseppe Alessio Verni, Jodoigne, BE;
Qi Xie, Wilsele, BE;
Michael Eugene Givens, Oud-Heverlee, BE;
Varun Sharma, Helsinki, FI;
Andrea Illiberi, Leuven, BE;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10D 99/00 (2025.01); H10P 14/60 (2026.01);
U.S. Cl.
CPC ...
H10D 99/00 (2025.01); H10P 14/6339 (2026.01);
Abstract
Methods and systems for depositing threshold voltage shifting layers onto a surface of a substrate and structures and devices formed using the methods are disclosed. An exemplary method includes using a cyclical deposition process, depositing a threshold voltage shifting layer onto a surface of the substrate. The threshold voltage shifting layers are particularly useful for metal oxide semiconductor field effect transistors.