The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2026
Filed:
Jan. 03, 2023
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Masashi Enomoto, Koshi City, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T 7/00 (2017.01);
U.S. Cl.
CPC ...
G06T 7/0004 (2013.01); G06T 2207/10048 (2013.01); G06T 2207/30148 (2013.01);
Abstract
An analyzing deviceincludes an imaging unitconfigured to image a substrate surface; a defect range estimation unitconfigured to estimate a defect range, which is a range in which a defect exists on the substrate surface, based on an imaging result of the imaging unit; a gray value acquisition unitconfigured to acquire multiple gray values in the defect range when light is radiated to the substrate surface; and a defect type determination unitconfigured to determine a defect type in the defect range based on the gray value.