The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2026
Filed:
Mar. 12, 2024
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Eric Eva, Aalen, DE;
CARL ZEISS SMT GMBH, Oberkochen, DE;
Abstract
An optical element (M) for reflecting radiation includes: a substrate () formed from quartz glass or from a glass ceramic and having a first part-body () and a second part-body () that are joined along a bonding face () by hot bonding, a plurality of cooling channels () that run within the substrate () in the region of the bonding face () and are separated from one another by lands (), and a reflective coating () applied to a surface () of the first part-body. In the substrate, a respective cooling channel () has a channel wall () which, at at least one position (P) adjoining a respective land (), has a zero crossing temperature (T) that deviates by less than 3.0 K from a zero crossing temperature (T) at a middle (M) of the land. Also disclosed is an associated optical arrangement e.g. for an EUV lithography system.