The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2026
Filed:
Aug. 08, 2022
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Chun-Wei Liao, Taoyuan, TW;
Sheng-Wen Jiang, Hsinchu, TW;
Jan-Liang Yang, Taichung City, TW;
Hui-Chun Lee, Hsinchu, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;
Abstract
A storage system for storing photoresist coated semiconductor substrates includes a semiconductor substrate container configured to store a plurality of semiconductor substrates. The storage system further includes a gas inlet, a gas outlet, and a sensor coupled to the gas outlet and configured to measure a humidity of a gas exiting the semiconductor substrate container through the gas outlet. The storage system also includes a source of an inert gas or an extreme clean dry air connected via a gas purifier to the gas inlet. The storage system further includes a controller configured to control the gas purifier and the sensor to purge a humidity inside the semiconductor substrate container with the inert gas or the extreme clean dry air such that a relative humidity of the gas exiting the semiconductor substrate container is below a threshold relative humidity.