The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2026
Filed:
Aug. 04, 2023
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Wen-Zhan Zhou, Zhubei City, TW;
Heng-Jen Lee, Baoshan Township, TW;
Hsu-Yuan Liu, Zhudong Township, TW;
Yu-Chen Huang, Toufen Township, TW;
Cheng-Han Wu, Taichung City, TW;
Shih-Che Wang, Hsin-Chu City, TW;
Ho-Yung David Hwang, Chu Pei City, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Abstract
A method of supplying a chemical solution to a photolithography system. The chemical solution is pumped from a variable-volume buffer tank. The pumped chemical solution is dispensed in a spin-coater. The variable-volume buffer tank is refilled by emptying a storage container filled with the chemical solution into the variable-volume buffer tank.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile