The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2026
Filed:
Jan. 26, 2024
Applicant:
Kla Corporation, Milpitas, CA (US);
Inventors:
Avner Safrani, Misgav, IL;
Shai Mark, Kibutz Snir, IL;
Amir Aizen, Haifa, IL;
Maor Arbit, Haifa, IL;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10P 72/50 (2026.01); H10P 72/00 (2026.01); H10P 72/76 (2026.01);
U.S. Cl.
CPC ...
H10P 72/53 (2026.01); H10P 72/0606 (2026.01); H10P 72/7602 (2026.01);
Abstract
A substrate is to be loaded into an equipment front-end module of a fabrication or inspection tool. A first camera is situated on the substrate to image regions to a side of the substrate. A second camera is situated on the substrate to image regions below the substrate. One or more wireless transceivers on the substrate to transmit images captured by the first and second cameras.