The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2026
Filed:
Feb. 22, 2024
The Government of the United States, As Represented BY the Secretary of the Air Force, Wright-Patterson AFB, OH (US);
Hengky Chandrahalim, Beavercreek, OH (US);
David Lynes, Wright-Patterson AFB, OH (US);
United States of America as represented by the Secretary of the Air Force, Wright-Patterson AFB, OH (US);
Abstract
A method of enhancing an electromechanical coupling coefficient of a microelectromechanical ('MEMS') device. The method includes applying, to a fully fabricated MEMS device, heavy particle ion radiation to the MEMS device at a fluence of at least 1×10cm. According to other embodiments of the present invention are directed to a bandpass filter comprising a plurality of MEMS devices fabricated in accordance with the methods provided. The MEMS of the plurality are electronically or mechanically coupled.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile