The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2026
Filed:
Mar. 05, 2024
Ebara Corporation, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
An information processing device generates a substrate processing schedule for sequentially performing respective processes on a predetermined number of substrates in a substrate processing device. The information processing device includes a substrate processing time acquisition part which acquires polishing time and finishing time based on recipe information; a transport processing time acquisition part which acquires transport time; and a schedule generation part which generates a substrate processing schedule by setting a processing order condition, a simultaneous processing condition, a transfer processing priority condition which specifies that a pre-polishing transfer process is prioritized over a post-polishing transfer process as constraint conditions for mathematical optimization, setting final processing end time for a final substrate being the shortest as an objective function of the mathematical optimization, and performing the mathematical optimization which determines start timings of the respective processes.