The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2026
Filed:
May. 02, 2023
Applicant:
Ngk Insulators, Ltd., Nagoya-City, JP;
Inventors:
Toshikatsu Kashiwaya, Inazawa-City, JP;
Atsuo Kondo, Okazaki-City, JP;
Hiroki Chaen, Yokohama-City, JP;
Takashi Tanimura, Handa-City, JP;
Naoki Goriki, Kasugai-City, JP;
Assignee:
NGK INSULATORS, LTD., Nagoya, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/22 (2012.01); G02B 1/14 (2015.01);
U.S. Cl.
CPC ...
G03F 1/22 (2013.01); G02B 1/14 (2015.01);
Abstract
There is provided an EUV transmissive membrane having an EUV transmittance of 80.0% or more at a wavelength of 13.5 nm and including a main layer having an IR emissivity of 2.0% or more at a wavelength of 2 μm and a protective layer that covers at least one side of the main layer and has an IR transmittance of 70% or more at a wavelength of 2 μm.