The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2026
Filed:
May. 07, 2021
San-apro Ltd., Kyoto, JP;
Yoshihiko Akazawa, Kyoto, JP;
Tomohito Kizu, Kyoto, JP;
Ryosuke Takahashi, Kyoto, JP;
Yuji Nakamura, Kyoto, JP;
Hideki Kimura, Kyoto, JP;
SAN-APRO LTD., Kyoto, JP;
Abstract
Provided is an onium salt functioning as a photoacid generator. The photoacid generator can provide a chemically amplifiable photoresist composition when it is combined with a resin component whose solubility in alkali is increased by the action of an acid generated by active energy ray irradiation such as Light or electron beam irradiation. The present invention relates to an onium salt represented by the formula (1), containing an anion structure with a proportion of a facial isomer in a total of the facial isomer and a meridional isomer being 15.0% by weight or lower.[(R)-E][(R)(F)P] (1)