The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2026
Filed:
Dec. 22, 2022
Semes Co., Ltd., Cheonan-si, KR;
Abstract
A cleaning device for cleaning a rear face of a substrate may include a housing, an electrostatic chuck disposed in the housing wherein the substrate is placed on the electrostatic chuck, at least one adsorption member configured to place the substrate onto the electrostatic chuck, a driving member configured to rotate the electrostatic chuck, a circulation member coupled to the driving member and configured to form a circulating airflow for preventing scattering of a cleaning solution in the housing, at least one auxiliary circulation member disposed adjacent to the circulation member wherein the at least one auxiliary circulation member includes a circulation hole for the circulating airflow, and at least one nozzle disposed adjacent to the at least one auxiliary circulation member and configured to the cleaning solution onto the rear face of the substrate.