The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 16, 2026

Filed:

Oct. 04, 2024
Applicant:

Gigaphoton Inc., Tochigi, JP;

Inventor:

Ken Yamada, Oyama, JP;

Assignee:

Gigaphoton Inc., Tochigi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); H05K 5/02 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70825 (2013.01); H05K 5/0226 (2013.01); H05K 5/0234 (2013.01); G03F 7/70033 (2013.01);
Abstract

An electric component box includes a first box into which a wiring from the extreme ultraviolet light generation chamber device is introduced and capable of being fixed to a placement surface; a second box into which a wiring from the first box is introduced and capable of being switched, by being raised and lowered, between a fixed state and a movable state; and a connection device providing connection as allowing the second box to be rotatable with respect to the first box, from a facing state in which a predetermined side wall of the first box and a predetermined side wall of the second box face each other, in a direction in which the predetermined side wall of the first box and the predetermined side wall of the second box move away from each other, and to be capable of being raised and lowered with respect to the first box.


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