The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2026
Filed:
Apr. 26, 2023
Applicant:
Fujifilm Electronic Materials U.s.a., Inc., N. Kingstown, RI (US);
Inventors:
Jieying Jiao, Chandler, AZ (US);
Thomas Dory, Gilbert, AZ (US);
Assignee:
Fujifilm Electronic Materials U.S.A., Inc., North Kingstown, RI (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 3/00 (2006.01); C11D 3/30 (2006.01); C11D 3/34 (2006.01); C11D 7/50 (2006.01);
U.S. Cl.
CPC ...
C11D 3/34 (2013.01); C11D 3/30 (2013.01); C11D 7/5004 (2013.01); C11D 2111/22 (2024.01); C11D 2111/46 (2024.01);
Abstract
This disclosure relates to compositions for cleaning post etching residues on a semiconductor substrate, as well as related cleaning methods.