The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2026
Filed:
Aug. 09, 2023
Disco Corporation, Tokyo, JP;
Tomoya Ogane, Tokyo, JP;
Miki Yoshida, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A processing apparatus includes a holding table and a processing unit. The processing unit includes a spindle unit having a spindle and a housing in which the spindle is rotatably supported. The processing unit is connected to a spindle temperature adjusting unit for adjusting the temperature of the spindle unit to a predetermined temperature. The spindle temperature adjusting unit includes a circulation route through which a cooling liquid to be introduced into the housing circulates and a heat exchanger connected to the circulation route. The heat exchanger is supplied with a processing liquid, to lower the temperature of the cooling liquid flowing in the circulation route with the processing liquid and increase the temperature of the processing liquid with the cooling liquid.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile