The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 16, 2026

Filed:

Jun. 26, 2023
Applicant:

Disco Corporation, Tokyo, JP;

Inventor:

Naoki Murazawa, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23K 26/53 (2014.01); B28D 5/00 (2006.01); C01B 32/28 (2017.01); C30B 29/04 (2006.01); H10P 34/42 (2026.01); B23K 103/00 (2006.01);
U.S. Cl.
CPC ...
B23K 26/53 (2015.10); B28D 5/0011 (2013.01); C01B 32/28 (2017.08); B23K 2103/52 (2018.08);
Abstract

A diamond substrate manufacturing method includes positioning a focal point of a processing laser beam of such a wavelength as to be transmitted through diamond to a depth from a first surface of a workpiece including diamond, the depth corresponding to a thickness of a diamond substrate to be manufactured, applying the processing laser beam to form a peeling layer including graphite sections formed through graphitization of portions inside the workpiece and cracks extending from the graphite sections, applying a peeling laser beam of such a wavelength as to be transmitted through diamond and absorbed in graphite, to heat the graphite sections, thereby causing at least a part of the graphite sections to react with oxygen in the atmosphere to generate carbon dioxide and to form gaps, and peeling off the diamond substrate from the workpiece with the gaps as a starting point.


Find Patent Forward Citations

Loading…