The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2026
Filed:
Oct. 10, 2023
Niterra Co., Ltd., Nagoya, JP;
Kazuaki Ooyachi, Nagoya, JP;
Hiroyuki Nakamura, Nagoya, JP;
NITERRA CO., LTD., Nagoya, JP;
Abstract
A substrate holding member includes a flat-plate-shaped base body that has at least one vent hole and a grooved portion, the at least one vent hole opening in an upper surface, the grooved portion communicating with the at least one vent hole and opening in a lower surface; a plurality of upper-surface convex portions that are formed so as to protrude upward from the upper surface of the base body; and an upper-surface ring-shaped convex portion that is formed in a ring shape along an outer periphery of the upper surface of the base body so as to protrude upward from the upper surface, wherein a cross-sectional area of the grooved portion in a direction perpendicular to a flow path direction is 1.2 mmor greater.