The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2026

Filed:

Jan. 05, 2022
Applicant:

Stats Chippac Pte. Ltd., Singapore, SG;

Inventors:

Changoh Kim, Incheon, KR;

Jinhee Jung, Incheon, KR;

Yujeong Jang, Incheon, KR;

Jiwon Lee, Seoul, KR;

Assignee:

STATS ChipPAC Pte. Ltd., Singapore, SG;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); B08B 5/02 (2006.01); B08B 5/04 (2006.01); B08B 15/02 (2006.01); H01L 21/67 (2006.01); H10P 70/00 (2026.01); H10P 72/00 (2026.01);
U.S. Cl.
CPC ...
H10P 70/20 (2026.01); B08B 5/02 (2013.01); B08B 5/04 (2013.01); B08B 15/02 (2013.01); H10P 72/0406 (2026.01);
Abstract

A semiconductor manufacturing equipment has a support platform and a substrate disposed over the support platform. A first electrical component is disposed over a first surface of the substrate. A second electrical component is disposed over a second surface of the substrate opposite the first surface of the substrate. A suction hood is disposed over the substrate. A gas is introduced over the substrate to circulate residue while drawing the residue vertically into the suction hood. The gas can be introduced with a gas nozzle or air knife. The gas can be introduced from a gas conduit disposed at least partially around the substrate. The gas conduit can extend completely around the substrate. The gas nozzles are sequentially placed around the gas conduit. The gas can be a stable or inert gas. The residue is displaced away from the second electrical component.


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