The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2026

Filed:

Sep. 28, 2023
Applicant:

Fuji Electric Co., Ltd., Kawasaki, JP;

Inventors:

Takeshi Tawara, Tsukuba-city, JP;

Shinsuke Harada, Tsukuba-city, JP;

Assignee:

FUJI ELECTRIC CO., LTD., Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/36 (2006.01); H01L 29/16 (2006.01); H10D 30/60 (2025.01); H10D 62/60 (2025.01); H10D 62/832 (2025.01); H10D 64/27 (2025.01); H10D 12/01 (2025.01);
U.S. Cl.
CPC ...
H10D 62/60 (2025.01); H10D 30/615 (2025.01); H10D 62/8325 (2025.01); H10D 64/513 (2025.01); H10D 12/031 (2025.01);
Abstract

A silicon carbide semiconductor device has an n-type silicon carbide semiconductor substrate, an n-type first semiconductor layer, n-type first JFET regions, a p-type second semiconductor layer, n-type first semiconductor regions, and trenches. The first semiconductor layer has an impurity concentration lower than that of the substrate. The first JFET regions are provided in a surface layer of the first semiconductor layer and have an effective donor concentration higher than that of the first semiconductor. The p-type second semiconductor layer is provided at a surface of the first semiconductor layer. The n-type first semiconductor regions are selectively provided in a surface layer of the second semiconductor layer. The trenches penetrate through the first semiconductor regions, the second semiconductor layer, and the first JFET regions. The first JFET regions are doped with an acceptor that is aluminum and a donor that is nitrogen or phosphorus.


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