The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2026
Filed:
Feb. 14, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Aaron Dangerfield, San Jose, CA (US);
Jesus Candelario Mendoza-Gutierrez, San Jose, CA (US);
Bhaskar Jyoti Bhuyan, San Jose, CA (US);
Mark Saly, Santa Clara, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 16/02 (2006.01); C23C 16/30 (2006.01); C23C 16/455 (2006.01); H10P 14/60 (2026.01); H10P 14/68 (2026.01); H10P 14/694 (2026.01); H10P 50/28 (2026.01);
U.S. Cl.
CPC ...
H10P 14/69433 (2026.01); C23C 16/0245 (2013.01); C23C 16/308 (2013.01); C23C 16/45525 (2013.01); H10P 14/6339 (2026.01); H10P 14/6514 (2026.01); H10P 14/6682 (2026.01); H10P 14/683 (2026.01); H10P 50/287 (2026.01);
Abstract
Methods of forming semiconductor devices by enhancing selective deposition are described. In some embodiments, a blocking layer is deposited on a metal surface before deposition of a barrier layer. A substrate with a metal surface, a dielectric surface and an aluminum oxide surface has a blocking layer deposited on the metal surface using an alkylsilane.