The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2026
Filed:
Jan. 04, 2021
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Albertus Victor Gerardus Mangnus, Eindhoven, NL;
Maikel Robert Goosen, Eindhoven, NL;
Erwin Paul Smakman, Eindhoven, NL;
Yan Ren, Eindhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/153 (2006.01);
U.S. Cl.
CPC ...
H01J 37/153 (2013.01); H01J 2237/151 (2013.01); H01J 2237/2809 (2013.01);
Abstract
An apparatus comprising a set of pixels configured to shape a beamlet approaching the set of pixels and a set of pixel control members respectively associated with each of the set of pixels, each pixel control member being arranged and configured to apply a signal to the associated pixel for shaping the beamlet.