The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 02, 2026

Filed:

Jan. 04, 2024
Applicant:

Industrial Technology Research Institute, Hsinchu, TW;

Inventors:

Hung-Hsin Shih, Hsinchu City, TW;

Kun-Ping Huang, Miaoli County, TW;

Chi-Chang Hu, Hsinchu City, TW;

Da-Je Hsu, Taoyuan City, TW;

Chen-Wei Tai, Hsinchu City, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01G 11/86 (2013.01); C01B 32/186 (2017.01); C01B 32/194 (2017.01); C23C 16/26 (2006.01); C23C 16/511 (2006.01); C23C 16/56 (2006.01); H01G 11/32 (2013.01);
U.S. Cl.
CPC ...
H01G 11/86 (2013.01); C01B 32/186 (2017.08); C01B 32/194 (2017.08); C23C 16/26 (2013.01); C23C 16/511 (2013.01); C23C 16/56 (2013.01); H01G 11/32 (2013.01); C01B 2204/04 (2013.01); C01B 2204/22 (2013.01); C01P 2002/82 (2013.01); C01P 2002/85 (2013.01); C01P 2004/03 (2013.01); C01P 2006/40 (2013.01);
Abstract

A manufacturing method of an electrode of an energy storage element includes: providing a substrate into microwave plasma equipment; introducing a carrier gas and a carbon precursor gas into the microwave plasma equipment; forming multi-layer graphene walls on the substrate through microwave plasma chemical vapor deposition; and immersing the substrate containing the multi-layer graphene walls in an electrolyte solution to perform electrochemical activation treatment, so that ions in the electrolyte solution are intercalated between adjacent graphene walls. A volume ratio of the carrier gas to the carbon precursor gas is 1:10 to 10:1. An electrode of an energy storage element is also provided.


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