The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 02, 2026

Filed:

Sep. 24, 2021
Applicants:

Nikon Metrology NV, Leuven, BE;

Nikon Corporation, Tokyo, JP;

Inventors:

Anthony Slotwinski, Nellysford, VA (US);

Ghassan Chamsine, Haymarket, VA (US);

Tom Hedges, Haymarket, VA (US);

Paul Lightowler, Birmingham, GB;

Daniel Gene Smith, Tucson, AZ (US);

Yasuhiro Hidaka, Fujisawa, JP;

Masanori Arai, Kamakura, JP;

Assignees:

Nikon Metrology NV, Leuven, BE;

Nikon Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01S 17/89 (2020.01); G01S 7/481 (2006.01); G02B 5/04 (2006.01); G02B 26/08 (2006.01); G02B 27/10 (2006.01); G02B 27/14 (2006.01); G02B 27/28 (2006.01);
U.S. Cl.
CPC ...
G01S 17/89 (2013.01); G01S 7/4817 (2013.01); G02B 5/04 (2013.01); G02B 26/0875 (2013.01); G02B 27/1006 (2013.01); G02B 27/141 (2013.01); G02B 27/148 (2013.01); G02B 27/283 (2013.01); G02B 27/286 (2013.01); G02B 27/288 (2013.01);
Abstract

Laser radar include two part objective lenses that are used for imaging a target and directing probe beams to the target. Portions of tracer beams that degrade target images are attenuated with dichroic filters that block central portions of tracer beams. Local oscillator beams can be produced with a mixing lens that directs probe beams through a polarizing beam splitter to focus at or on a waveplate so that portions are reflected from the waveplate as local oscillator beams. An imaging system that is confocal with a probe beam is coupled to provide target measurements or to establish a focus of the probe beam.


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