The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 02, 2026

Filed:

May. 30, 2024
Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Dipak Aryal, Austin, TX (US);

Kate Abel, Austin, TX (US);

Antonio Luis Pacheco Rotondaro, Austin, TX (US);

Takeo Nakano, Nirasaki City, JP;

Tamotsu Morimoto, Nirasaki City, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/1333 (2006.01); B82Y 20/00 (2011.01); B82Y 30/00 (2011.01); C09K 19/40 (2006.01); G02F 1/136 (2006.01); C09K 19/04 (2006.01);
U.S. Cl.
CPC ...
C09K 19/404 (2013.01); B82Y 20/00 (2013.01); B82Y 30/00 (2013.01); G02F 1/13613 (2021.01); C09K 2019/0414 (2013.01);
Abstract

Embodiments of improved methods are provided to form ordered structures on a surface of a substrate using direct self-assembly (DSA) of ionic liquid crystals (ILCs). More specifically, various embodiments of methods are provided to control the phase of an ordered structure formed on a substrate surface via self-assembly of ILCs having cation head groups, alkyl tail groups having a plurality of hydrocarbons and anions. In the embodiments disclosed herein, the phase of the ordered structure is controlled by replacing the hydrogen (H) atoms of the hydrocarbons included the alkyl chain with larger sized functional groups. Adding larger sized functional groups to the alkyl chain changes the phase of the ordered structure by: (a) increasing the separation between the hydrophilic (cation) and hydrophobic (alkyl tail) groups of the ILCs, and (b) changing the orientation of alkyl tails within the tail groups of the self-assembled ILCs.


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