The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2026
Filed:
May. 13, 2024
Taiwan Semiconductor Manufacturing Company Limited, Hsin-Chu, TW;
Shih Yang Chiu, Taipei County, TW;
Cheng-Lung Wu, Zhunan Township, Miaoli County, TW;
Chai Hsien Chen, Tainan City, TW;
Chaolin Lo, Tainan City, TW;
Yang-Ann Chu, Hsinchu City, TW;
Taiwan Semiconductor Manufacturing Company Limited, Hsin-Chu, TW;
Abstract
A system includes an electrostatic chuck defining a first conduit configured to emit a first gas. The system includes a conduit check apparatus for identifying a first conduit status of the first conduit. The conduit check apparatus includes a thermochromic structure including a first region positioned relative to a flow path of the first gas emitted from the first conduit. The first region of the thermochromic structure produces a first visual indication of the first conduit status.