The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2026
Filed:
May. 23, 2024
Apet Co., Ltd., Pyeongtaek-si, KR;
APET CO., LTD., Pyeongtaek-si, KR;
Abstract
The present disclosure provides a substrate processing apparatus provided with a rotating table for supporting and rotating a substrate and collection cups for collecting treatment solutions sprayed onto the substrate, which includes the collection cups disposed outside the rotating table and each provided therein with a space for collecting the treatment solution, one pair of lifting shafts connected to each of the collection cups, and one pair of driving modules connected to each of the lifting shafts, wherein an outermost third driving part among the driving modules is a motor driving type, an inner driving module disposed inside the third driving part is a hydraulic driving type, and a liftable height of a third collection cup connected to the third driving part and lifted by a third lifting shaft is higher than a liftable height of a collection cup lifted by the inner driving module.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile